1

Optical characterization of dielectric borophosphosilicate glass

Year:
2000
Language:
english
File:
PDF, 276 KB
english, 2000
10

Optical properties of LPCVD silicon oxynitride

Year:
1999
Language:
english
File:
PDF, 221 KB
english, 1999
13

Microstructural and optical properties of as-deposited LPCVD silicon films

Year:
2001
Language:
english
File:
PDF, 284 KB
english, 2001